Study in Reducing the Color Filter Oven Process Heating Period Based on the Rheology Characteristics of Photoresist Polymer

• Main Authors: Hsia, Yu-Lin, 夏峪霖
• Other Authors: Cheng, Shy-Dong
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/78756857252069367632

碩士 === 國立交通大學 === 平面顯示技術碩士學位學程 === 98 === The expansion of color filter production line frequently related to huge capital investment, therefore, a careful assessment of the situation on the demand on the variety of TFT-LCD displays; the setup cost as well as the factory district establishment is necessary. Normally, the most suitable plan will reveal the cost consideration on production line expansion or new factory construction. If the appraisal conclusions showed that the same achievement can be made by the efforts to upgrade or expand on the existing machines at less cost than to purchase the new equipments, the final decision for competitive advantage regarding the cost is apparent. This research is the study in upgrading the existing machines of the color filter production line by reducing the color filter oven process heating period to achieve a goal of increasing the productivity. It based on the rheology characteristics of photoresist polymer to study in reducing the Color Filter oven process heating period by the experiment of temperature compensation on the correct basis. From the SEM analysis results, the control of heating time and the compensation on the both "time and temperature" during the color filter over process can expect to obtain a solution that solves the quality issue of the photoresist taper angle. The performance of the "time and temperature" recipe is verified through the in-line process experiments, and the effectiveness is confirmed by FTIR analysis procedures. This "time and temperature" recipe is currently introduced in the color filter production process.