A CMOS micromachined resonant sensor with thermal actuation and piezoresistive sensing
碩士 === 國立交通大學 === 機械工程系所 === 98 === Micromachined resonant sensors have the advantages of robust measurement and quasi-digital output and thus have been applied to various applications such as: pressure measurement, bio-molecular detection, and etc. Realizing these devices with industrial IC CMOS pr...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/11809649355899236369 |