Design, Implementation and Integration of Novel Micro Actuators for Optical MEMS Applications

• Main Authors: Hung, Chen-Chun, 洪振鈞
• Other Authors: Chiou, Jin-Chern
• Format: Others
• Language: en_US
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/01189376621813221627

博士 === 國立交通大學 === 電控工程研究所 === 98 === MEMS actuators play very important rule in recent optical systems. Because of the requests of excellent optical quality and easy packaging function, optical MEMS actuators are usually designed with flatness reflection or diffraction mirrors, high suspended capability, and higher output force. In this dissertation, two kinds of optical devices, phase shifters and image stabilizers, are designed and fabricated and implemented. In the design of MEMS phase shifter, we utilize the TSMC O.35 μm CMOS MEMS foundry process to manufacture the micromirror array. CMOS foundry process offers the probability of easy integration of MEMS devices and circuits. To eliminate the warped phenomenon of micromirror array, a 40 μm reserved proof mass is designed and fabricated by the self-design post process. Furthermore, by the design of hidden net electrode, this device achieves a high fill factor of more than 90% without an additional flip-chip bonding process and is suitable to attach in holographic DVD pickup head for reading application. In the design of image stabilizer, the proposed stabilizers are designed as a two axis decoupling XY stages. By the design of high aspect ratio structure, this device is with large force output, and adequately strong to suspend an image sensor for anti-shaking photographic function. Furthermore, based on the design of the special wire bonding assisted holder, the image sensor can be successfully bonded to the image stabilizer. Additionally, electrical signals of the image sensor can be connected and integrated with the output circuits based on the signal spring design.