Design, Implementation and Integration of Novel Micro Actuators for Optical MEMS Applications
博士 === 國立交通大學 === 電控工程研究所 === 98 === MEMS actuators play very important rule in recent optical systems. Because of the requests of excellent optical quality and easy packaging function, optical MEMS actuators are usually designed with flatness reflection or diffraction mirrors, high suspended capabi...
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| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01189376621813221627 |