Study of laser sensor for sub-micron displacement measurement
碩士 === 國立交通大學 === 電子物理系所 === 98 === The purpose in this study is to design a laser triangulation displacement sensor with high speed about 20 kHz and resolution up to sub-micron class, which can be applied to inspection in the industry by describing one dimension profile. We study principle of trian...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91025914715440117069 |