Fabrication and Characterization of sub-50nm Thin Film SANOS Flash Memory
碩士 === 國立交通大學 === 電子研究所 === 98 === In this thesis, we discuss the feasibility of TFT SANOS memory devices in three dimension-integrated circuits (3D-ICs). For 3D-ICs, low temperature fabrication process is necessary. Therefore, one stacked conventional SONOS devices on poly-Si films, them the design...
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| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64054279865918476560 |