Effect of Thermal Treatment on Resistive Random Access Memory (RRAM) of Ni / HfOx / TiN Structure

碩士 === 國立交通大學 === 電子工程系所 === 98 === In this thesis, we used metal-oxide-metal (MOM) structure of nickel (Ni), non-stoichiometric hafnium oxide (HfOx), and titanium nitride (TiN) to demonstrate RRAM characteristics. Voltage-induced resistance switching is repeatedly observed in the Ni/HfOx/TiN device...

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Bibliographic Details
Main Authors: Chen, Hsin-Yu, 陳信宇
Other Authors: Chang, Kow-Ming
Format: Others
Language:en_US
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/52213551713034098329