Fabrication of TiO2 Nanorod Arrays on a Quartz Substrate Using Anodic Oxidation

• Main Authors: Lin, Hsiao-Wei, 林曉葳
• Other Authors: Chen, Chih
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/46666377390520017612

碩士 === 國立交通大學 === 材料科學與工程學系 === 98 === Recently, the interest to the double-layered anodic oxide arises because of its special applications. It has been reported that a nanostructured anodic oxide can be formed from the underlying metal through the anodic aluminium oxide. And some research indicated that main factor which influence the formation of oxide is the difference of ionic resistivity. In this work, we use anode oxidation to fabricate TiO2 nanorod arrays on a quartz substrate and study their growth mechanism. The anodic process is mainly divided into two parts, anodizing Al layer and Ti layer. The density, diameter and height of the TiO2 nanorods could be controlled by changing the variables of experiment and its growth rate is really fast at the initial stage. From the photoluminescence spectra we could found out that with higher surface area to volume ratio, the PL response will shift to longer wavelengths and the intensity is related to the surface area of the TiO2 nanorods. We also use TiO2 nanorods as the field ionization anode to test the breakdown voltage in different atmosphere. The results show good selectivity and thus they can be used as gas sensors.