High-Performance Enhancement-mode AlGaN/GaN HEMTs Utilizing Fluorine Plasma Treatment

碩士 === 國立交通大學 === 材料科學與工程學系 === 98 === Enhancement mode (E-mode) AlGaN/GaN HEMTs utilizing Fluorine plasma treatment is investigated in this study. The Fluorine-plasma technique effectively converted the device from conventional depletion mode (D-mode) into E-mode operation. The threshold voltage of...

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Bibliographic Details
Main Authors: Hsu, Ting-Hung, 徐廷鋐
Other Authors: Chang, Yi
Format: Others
Language:en_US
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/75597381753639395297