| Summary: | 碩士 === 國立交通大學 === 工學院碩士在職專班精密與自動化工程組 === 98 === The aim of this study is to solve a device in TFT-LCD class 1000 Fab clean room to connect front-end cleanliness Class 100 of the Array process and the cleanliness Class 100、Class 10 of the Cell process AMHS stocker dust particles pollution problems. Because AMHS stocker at the beginning of design negligence and on-site installation errors, Stocker dustproof jacket ceiling Class 100 filter FFU is unable to cover this shell completely, has 3/4 area to expose in the Class 1000 cleanliness environment. Causes in the Stocker seal space the air flow non-uniform and air change ability is insufficient, so that dust particles deposition to be remained in the Class 100 cleanliness environment, Panel glass surface caused by the dust particle pollution. It makes the manufacturing process for high rate of bad losses.
This research main purpose needs to use the turbulent flow k-ε model which summarizes from the experiment phenomenon, it is a semi-empirical formula, as applicable to a wide range of economic and reasonable accuracy, therefore is used widely in the industry flow field, carries on the numerical simulation analysis , to look at stocker in cassette storage spaces inside cassette flow field uniformity between the plate glass, in the flow field the air age and the pressure change. And use the stocker inner space after the localization indication, the measurement of the velocity, direction and distribution of fine dust particles compared with the simulated values to identify the error to determine the scope of its legitimacy; then putting it back to solve the FFU exposed to effectively improve the response. After improve, in the AMHS Stocker dust particle can discharge smoothly, the maintenance air age value conforms with in the industry class, the corresponding value of the cleanliness Class 100 or less and re-evaluate the need for FFU 100% covered to reduce maintenance costs after the operation.
|
|---|
