Evaluation of Dual-Fab Design Alternatives for Semiconductor Manufacturing

• Main Authors: Chen, Show-Yen, 陳曉嚴
• Other Authors: Wu, Muh-Cherng
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/33003841179453228807

碩士 === 國立交通大學 === 工業工程與管理學系 === 98 === This research examines three design alternatives for semiconductor fabs in order to compare their effectiveness under various scales of throughput requirements. The three design alternatives are respectively called single large fab (SL-fab), two functionally-comprehensive fabs (TFC-fab), and two functionally-disjoint fabs (TFD-fab). Given a particular set of machine types and numbers, the three design alternatives use different methods in the decisions of physically locating these machines. In the SL-fab alternative, all machines of each type are placed in a workstation and all workstations are located in a single fab. In the TFC-fab alternative, all machines of each type are grouped into two workstations, each of which as a result is functionally identical and respectively placed in one of two smaller fabs. In contrast, the TFD-fab alternative, all machines of each type are placed in a workstation but all workstations are grouped into two categories, and each category is placed in one of two smaller fabs. Queuing network models are used to design the machine mix for and evaluate the effectiveness of the three design alternatives. Experiment results indicate that the SL-fab alternative is most suitable for small-scale throughput, the TFD-fab alternative is most suitable for mid-scale throughput, while the TFC-fab alternative might be most suitable for very large-scale throughput. Surely, ranges of the three-level scales of throughput depend upon how we make the assumptions about the revenue and cost information.