Investigation of Cost Estimates on Semiconductor Hookup Construction

• Main Authors: Wen, Chao-Pao, 温兆寶
• Other Authors: Wang, Wei-Chih
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/42217908521905655086

碩士 === 國立交通大學 === 工學院碩士在職專班工程技術與管理組 === 98 === Semiconductor hookup construction is the work for connecting the facility system and the tools of process module, such as Litho, Diffusion, Thin film, Wet etching, Dry etching, CMP, Integration, Implant module of semiconductor plant. And also one of the most critical construction works deeply influencing the capacity and yield of semiconductor plant. Practically the cost of semiconductor hookup construction is estimated mostly according to the experiences and the historic data. However, the types and quantities of the process tools used very with different production of each semiconductor plant. Therefore the common historical statistics have a problem of missing values which affects the accuracy of cost estimated. As of result, The AI system is applicable for data mining. This research establishes the characteristic parameters using 268 sets of actual cost data, including 11 working items (such as exhaust, bulk gas, specialty gas, vacuum line, process cooling water, foundation, chemical, ultra pure water, drain, power, low vacuum). It builds up a cost estimating model through the learning mechanism of the neuro-fuzzy system in order to improve precision for estimating the cost of the semiconductor hookup construction. This research use fuzzy adaptive leaning control network and fast messy genetic algorithms to estimate. The average precise rate is 78.8% ~ 95.7%, the original estimate method (arithmetic method of average) promotes 9.7% to 33.3%. This research at the stage of planning in the semiconductor hookup project, obtains the precise cost estimating initially. It may useful for the following researcher to refer. Deeply hope for the facility engineer of semiconductor and the Engineering firm could put into the following related research.