Kernel and Functional Mechanisms Refinement of Automatic Virtual Metrology System
碩士 === 國立成功大學 === 製造資訊與系統研究所碩博士班 === 98 === Virtual Metrology (VM) refers to a technology that is able to conjecture product quality using important parameter data of production equipment and adopting a proper prediction scheme without conducting real metrology. In an automatic VM system (AVMS), the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/00478909290894133411 |