Direct Metal Contact Printing and Roller Printing Technology for Micro/Nano-Structure Fabrication and Applications

• Main Authors: Chun-HungChen, 陳俊宏
• Other Authors: Yung-Chun Lee
• Format: Others
• Language: en_US
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/21891876099345924029

博士 === 國立成功大學 === 機械工程學系碩博士班 === 98 === The inventions of nano-imprinting and nano-printing lithography create a new landmark for nano-patterning technology. The differences between conventional photolithography and nano-imprinting and nano-printing lithography are that nano-imprinting and nano-printing lithography have the advantages of low cost and high efficient in nano-patterns transfer process. For this reason, this dissertation investigates the nano-patterning technology which utilizes an infrared laser or an infrared lamp to heat up the metallic patterns and transfer the metallic patterns from the surface of a mold to a substrate. Furthermore, another objective of this study is to build up a stable and reliable process for continuous pattern transfer over large area. To achieve the aforementioned objectives, we developed several techniques fort pattern transfer ranging from infrared laser assisted direct contact printing lithography (IR-LCP) to infrared lamp assisted roller contact printing lithography (IR-RCP). By observing their experimental results, we modify and improve these processes such as replacing an infrared pulse laser by an infrared lamp, a plane pressure by a line-shape loading force by a roller and a rigid Si substrate by a flexible polyethylene terephthalate (PET) substrate. These changes can achieve our objectives in nano-patterns transfer with low cost, high efficient, and large area. In addition, a dual-step contact printing lithography is developed which can enhance the efficiency in the recycling of the used mold and reduce the residual metal films on the used mold. This technique utilizes a UV resin with both the properties of adhesion and UV curing to adhere the bottom metal layer. It can allow one single mold to transfer two highly complementary patterns to two different substrates separately and reduce the residual metal films on the used mold. Finally, two applications on the fabrications of a flexible polarizer and the highly ordered metallic micro/nano-particles have been proposed in this dissertation based on IR-LCP and IR-RCP. The highly ordered metallic micro/nano-particles are applied to the research of surface plasmon resonance (SPR). Experimental results successfully demonstrate that the infrared assisted direct contact printing technologies are an effective tools for micro/nano-patterning and micro/nano-structure fabrication as well as related innovative devices.