ZnO EGFET pH sensor grown by vapor coolingcondensation technique
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 98 === In this study, the vapor cooling condensation techique combining with AAM template was utilized to deposit zinc oxide thin film/nanostructure-layer complex structures, which was used as the sensing membrane of extended-gate field-effect-transistor (EGFET) pH...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91438721115149238985 |