Investigation of Silicon-based Thin-Film Solar Cell grown by Laser-assisted Plasma Enhanced Chemical Vapor Deposition
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 98 === In this work, the laser assisted plasma enhanced chemical vapor deposition technique has been developed to deposit microcrystalline silicon-based ?lms at low temperature. This study investigates the thin films performance of P-type silicon-carbide , I-type s...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41279273176161650185 |