Growth and Measurement Characteristics of Individual Suspended Single-Walled Carbon Nanotubes

• Main Authors: Chen-HsuanHsu, 徐振軒
• Other Authors: Chie Gau
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/14328271000128871863

碩士 === 國立成功大學 === 航空太空工程學系碩博士班 === 98 === Carbon nanotubes have attracted many attentions and interests of the researchers due to their excellent appearance, structure, electricity or mechanical properties. Single-walled carbon nanotubes (SWNTs) were prepared with alcohol catalytic chemical vapor deposition (ACCVD). Safe alcohol vapor is used as a carbon source for growing pure SWNTs. The nanotube devices was fabricated by the process of microelectromechanical system (MEMS). The individual single-walled nanotube devices was doped by introducing the nitrogen to ACCVD reactor. In this article, standard semiconductor parameter extraction systems were used for the measurement of transfer characteristics of nanotube devices. The temperature coefficient of resistance (TCR) could help us to know the characteristics of the nanotubes. We could observe the doping effect of the nanotube devices. Show through the analysis result of the experimental data, there were finded that the height of electrode micro-pillars and the concentration of catalysts play very important roles in growing individual suspended SWNTs. The distance from the top of the pillars to the bottom of them must be longer than the distance between the opposite pillars. Furthermore, when the concentration of the catalysts was lower than 0.05%, it was failure for growing individual suspended SWNTs. However, when the concentration was 0.15%, the diameter of SWNTs became bigger. They are not SWNTs. So the concentration of the catalysts must be between 0.05%~0.15%. Finally, high contact resistances may be due to the loose contacts between nanotubes and electrodes. It will affect the application of the individual suspended SWNT.