| Summary: | 碩士 === 國立勤益科技大學 === 機械工程系 === 98 === In this thesis, a new type of traveling-Wave Piezoelectric-driven conveyor workbench has been developed. The workbench is composed of a vibrating structure (vibrator stage)with piezoelectric beams, a moving platform and a driving circuit. The workbench is concision, miniaturization, no heat generation, no influence from magnetism. The moving platform is moved through the traveling-wave based vibration generated by vibrator stage with microscale displacement. In this thesis, two kinds of rotary and linear mobile platforms are developed. The factors that affect the platform performance are investigated in detail, such as driving voltage, driving frequency, loads, and contact surface conditions between vibration stage and moving platform.
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