| Summary: | 碩士 === 國立中興大學 === 精密工程學系所 === 98 === A compliant bistable mechanism is investigated in this research. It is actuated by the Lorenz force. The design parameters are displacement, bistability, and the Lorenz force. With current applied to the bistable mechanism, the displacement and the reaction force of the compliant bistable mechanism are investigated.
UV-LIGA process are used for fabrication of the prototypes. We use photolithography and electrodeposition to fabricate CoNi compliant bistable microstructures on glass substrates. On the fabrication aspect, taking advantage of good adhesion and selectively etching properties between Cu and CoNi, we use Cu as the sacrificial layer to fabricate the CoNi compliant bistable mechanism.
A versatile vibrometer for characterizing in-plane motion of microelectromechanical system (MEMS) is developed. It combines conventional optical components and a He-Ne Laser with incremental phase shifts. The system drives a digital charge-coupled device camera to record a video sequence of the moving structures frozen by the laser at twelve equally spaced phases. The periodic motion of the prototypes is estimated by computing the values of displacements between successive images. The natural frequencies of the prototypes are determined. The experimental results are in good agreement with those based on a MEMS Motion AnalyzerTM (MMA G2, Umech Technologies, USA).
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