An Investigation on the Diffraction and Absorption Effects of Proximity Lithography
碩士 === 國立中興大學 === 機械工程學系所 === 98 === Proximity lithography is one of the commonly employed processes for fabricating optics components and micro electromechanical system. However, patterns exposed on the photoresist often distored in the process due to optical diffraction and absorption effects of p...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96720367291800698801 |