The effects of thin-film PZT fabrication parameters on the film’s mechanical and electrical properties.
碩士 === 國立中興大學 === 機械工程學系所 === 98 === In this thesis, we used different parameters to improve quality of PZT thin film which is fabricated by sol-gel process. The quality of PZT thin film was characterized by crack areas, electrical properties and mechanical properties. The crack area was determi...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17110650452314067046 |