| Summary: | 碩士 === 國立中興大學 === 機械工程學系所 === 98 === With the demand of the booming mobile phone industry, phone functions are more powerful and humanized. Since 2009, most major mobile phone makers equipped their products with MEMS gyroscopes to enable advanced smart functions. The main advantage of MEMS technology is that mechanical or optical components, sensors, precision brakes, and integrated circuit can be miniaturized and integrated in a single chip to perform multi-functions. In addition, the reliability and functions of a MEMS device can be largely enhanced by the precise semiconductor manufacturing process. However, the common bottleneck that the MEMS device manufacturers encounter is the lack of quality test standards for the MEMS devices due to the variety of the MEMS products. Therefore, most of the testing equipments are designed and manufactured based on the particular requirements of an individual MEMS product manufacturer.
This study focuses on the development of a cost-effective test equipment for G-sensors based on the currently commercial Logic Handler. The main efforts are the mechanism design and the implementations of different test methods. G-sensor function related characteristics such as the rotation angle, G forces produced, and shaking environment are added to the Logic Handler. The signal from the currently used test equipments by an individual MEMS product manufacturer is then connected to the Logic Handler. The C++ software is implemented for signal connection and motion control. It is expected that the development of this study can provide a cost-effective and useful solution for the local MEMS product manufacturers.
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