CMOS-MEMS micromechanical RF switches
碩士 === 國立中興大學 === 機械工程學系所 === 98 === In this study, we present a RF (ratio frequency) MEMS (micro elector mechanical system) switch fabricated by the standard 0.35 μm 2P4M (double polysilicon four metal) CMOS (complementary metal oxide semiconductor) process. The switch is capacitive type and actuat...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01457686423350065607 |