Investigation on the structural characteristics of In2O3 films
碩士 === 國立中興大學 === 物理學系所 === 98 === In this study, the structural characteristics of In2O3 films deposited on (0001) sapphire substrates were analysed by transmission electron microscopy (TEM), x-ray diffraction (XRD), and scanning electron microscope (SEM). In2O3 films were grown by atomic layer dep...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/94413931364762981425 |