Characteristics of patterned magnetic ZnO nanorods

• Main Authors: Che-Neng Liu, 劉哲能
• Other Authors: Mon-Shu Ho
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/32406637496425272214

碩士 === 國立中興大學 === 物理學系所 === 98 === In this work, we introduce atomic layer deposition (ALD) into Vapor-Liquid-Solid (VLS) growth mechanism to fabricate Sn or Mg doped ZnO nanorods. We open different valves at different time. The properties of Sn or Mg doped ZnO nanorods such as topography, nanostructure and photoelectric are investigated by SEM, EDS, XRD, PL, TEM and conductive-AFM Our results demonstrate that our ZnO nanorods and Sn or Mg doped ZnO nanorods characteristic through MLD process. We compare with results of MLD and ion implanted, we can know whether the MLD process is working.