| Summary: | 碩士 === 國立中興大學 === 材料科學與工程學系所 === 98 === Because of light weight and easy portability, highly-efficiency flexible thin-film electronic products will generate many potential applications. However, the light emitting layer in the organic light emitting device(OLED) are readily susceptible to the moisture and oxygen which not only reduce the lifetime but pose safety problems. Therefore, how to limit the permeation of oxygen and water vapor into the OLED to such a small level by a suitable multilayer barrier package becomes an important issue.
In this work, samples with various or barrier materials such as respective silicon nitrides (SiNx), parylene and pairs of SiNx and parylene, are prepared using plasma-enhanced chemical vapor deposition (PECVD). In order to evaluate the effect of fabrication parameters on the characteristics of these barrier materials, with optimized fabrication parameters, various pairs of multilayer stacks containing SiNx and parylene are prepared to investigate the transmission rates of water vapor using a calcium (Ca) coating test and simulation by ANSYS and RSoft. ANSYS and RSoft softwares can be used to simulate the stress and optical properties for multilayer stacks design and optimization of process parameters. This study proposes an optinum structure for barrier materials (4 pair of SiNx /parylene stack) where the parylene is used as the insertion layer to smooth and strengthen the interfaces or surfaces of layers. After conducting the bending test for 1000 times, the water vapor transmission rate (WVTR) still keeps being below 7.05 × 10-5 g/m2-day under such a measurement environment (10 days at 25 ℃, 50% in relative humidity) the radius of curvature is 1.4 cm and the transmittance is above 90 %.
Keyword：flexible、OLED、WVTR、Ca test、PECVD
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