Hermetically carbon-coated optical fibers prepared by thermal chemical vapor deposition enhanced with inductively coupled plasma of different radio-frequency powers

碩士 === 國立中興大學 === 材料科學與工程學系所 === 98 === This study investigates the effects of different radio-frequency (rf) powers on the properties of carbon coatings on optical fibers that are prepared by thermal chemical vapor deposition enhanced with inductively coupled plasma. Methane (16 sccm) and nitrogen...

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Main Authors: Liang-Hsun Lai, 賴良訓
Other Authors: Sham-Tsong Shiue
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/55956265831234840527
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spelling ndltd-TW-098NCHU51590402017-10-29T04:34:04Z http://ndltd.ncl.edu.tw/handle/55956265831234840527 Hermetically carbon-coated optical fibers prepared by thermal chemical vapor deposition enhanced with inductively coupled plasma of different radio-frequency powers 以感應耦合式電漿輔助熱化學氣相沉積法製備碳密封鍍層光纖:不同電漿射頻功率對碳鍍層性質之影響 Liang-Hsun Lai 賴良訓 碩士 國立中興大學 材料科學與工程學系所 98 This study investigates the effects of different radio-frequency (rf) powers on the properties of carbon coatings on optical fibers that are prepared by thermal chemical vapor deposition enhanced with inductively coupled plasma. Methane (16 sccm) and nitrogen (4 sccm) were used as the precursor gases, and rf powers were set between 0 and 400 W. The deposition temperature, working pressure, and deposition time were set to 975 ℃, 4 kPa, and 2 hours, respectively. The coating thickness, microstructure, surface roughness, surface property, electrical property, and low-temperature morphology of carbon coatings were investigated by field emission scanning electron microscopy, X-ray diffraction spectrometer, Raman scattering spectrometer, X-ray photoelectron spectrometer, atomic force microscopy, contact angle meter, four-points probe, and optical microscopy. The results indicate that the deposition rate increases as the rf power increases from 0 to 200 W, but the deposition rate decreases as the rf power exceeds 200 W. The mean crystallite size (Lc) increases with increasing the coating thickness, but the degree of ordering and in-plane crystallite size (La) decrease. Moreover, when the rf power increases, the carbon coatings have more sp2 carbon atoms and become graphite-like. The results also show that the surface roughness is inversely related to the water contact angle. As the rf power increases from 0 to 400 W, the electrical resistivity of carbon coatings decreases from 56.96 to 14.01 Ω‧μm. Finally, based on the low-temperature morphologies of carbon coatings, as the coating thickness exceeds 76 nm, the carbon coating has the ability to withstand thermal stress, and is good for use as a hermetical optical fiber coating. Sham-Tsong Shiue 薛顯宗 2010 學位論文 ; thesis 98 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立中興大學 === 材料科學與工程學系所 === 98 === This study investigates the effects of different radio-frequency (rf) powers on the properties of carbon coatings on optical fibers that are prepared by thermal chemical vapor deposition enhanced with inductively coupled plasma. Methane (16 sccm) and nitrogen (4 sccm) were used as the precursor gases, and rf powers were set between 0 and 400 W. The deposition temperature, working pressure, and deposition time were set to 975 ℃, 4 kPa, and 2 hours, respectively. The coating thickness, microstructure, surface roughness, surface property, electrical property, and low-temperature morphology of carbon coatings were investigated by field emission scanning electron microscopy, X-ray diffraction spectrometer, Raman scattering spectrometer, X-ray photoelectron spectrometer, atomic force microscopy, contact angle meter, four-points probe, and optical microscopy. The results indicate that the deposition rate increases as the rf power increases from 0 to 200 W, but the deposition rate decreases as the rf power exceeds 200 W. The mean crystallite size (Lc) increases with increasing the coating thickness, but the degree of ordering and in-plane crystallite size (La) decrease. Moreover, when the rf power increases, the carbon coatings have more sp2 carbon atoms and become graphite-like. The results also show that the surface roughness is inversely related to the water contact angle. As the rf power increases from 0 to 400 W, the electrical resistivity of carbon coatings decreases from 56.96 to 14.01 Ω‧μm. Finally, based on the low-temperature morphologies of carbon coatings, as the coating thickness exceeds 76 nm, the carbon coating has the ability to withstand thermal stress, and is good for use as a hermetical optical fiber coating.
author2 Sham-Tsong Shiue
author_facet Sham-Tsong Shiue
Liang-Hsun Lai
賴良訓
author Liang-Hsun Lai
賴良訓
spellingShingle Liang-Hsun Lai
賴良訓
Hermetically carbon-coated optical fibers prepared by thermal chemical vapor deposition enhanced with inductively coupled plasma of different radio-frequency powers
author_sort Liang-Hsun Lai
title Hermetically carbon-coated optical fibers prepared by thermal chemical vapor deposition enhanced with inductively coupled plasma of different radio-frequency powers
title_short Hermetically carbon-coated optical fibers prepared by thermal chemical vapor deposition enhanced with inductively coupled plasma of different radio-frequency powers
title_full Hermetically carbon-coated optical fibers prepared by thermal chemical vapor deposition enhanced with inductively coupled plasma of different radio-frequency powers
title_fullStr Hermetically carbon-coated optical fibers prepared by thermal chemical vapor deposition enhanced with inductively coupled plasma of different radio-frequency powers
title_full_unstemmed Hermetically carbon-coated optical fibers prepared by thermal chemical vapor deposition enhanced with inductively coupled plasma of different radio-frequency powers
title_sort hermetically carbon-coated optical fibers prepared by thermal chemical vapor deposition enhanced with inductively coupled plasma of different radio-frequency powers
publishDate 2010
url http://ndltd.ncl.edu.tw/handle/55956265831234840527
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