Development and Application of Thin Film Optical Inspection Technology

• Main Authors: Chin-Sheng Chao, 趙金聖
• Other Authors: Chil-Chyuan Kuo
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/32767433657804808985

碩士 === 明志科技大學 === 機電工程研究所 === 98 === The development of optical inspection technique has been booming over recent years, and both the optical elements and thin films can be tested in their surface roughness and recrystallization characterization with optical inspection technology. This paper is aimed at setting up a simple optical path to detect with the help of the laser source, making it fast and convenient to operate and coming into a non-destructive real-time optically inspecting measure which can be used in product lines of mass production. The power stability of the probe laser source and the laser beam wander precision are important factors for optical inspection, so firstly three probe lasers were evaluated and analyzed which are most frequently used in on-line optical technology. The result shows that 0.5 to 18 hours after turning on the linear polarized He-Ne laser is the ideal time for the inspection of thin films, for both the laser power stability and laser beam wander precision have come to the perfect values. Secondly install three pinholes with different diameters in front of the linear polarized He-Ne laser and analyze them, and from the results of the experiment it’s known that the diameter of 0.3mm is most suitable to detect thin films. Then, the previous experimental results in the research were used to develop the rapid optical inspection system to detect the surface roughness of BiFeO3 films, low-temperature polycrystalline silicon films and AZO, and the trend equation for the best prediction of surface roughness and the best measuring angle (60°) can be obtained. In addition to the investigation of the re-crystallization characteristic of low temperature polycrystalline silicon films on the basis of combination of digital ammeter and light detectors, the overall measuring error rate will be confined within 10%. The features of the system include: non-destructive inspection, fast inspection, simple principle, excellent stability and reliability.