Development and Application of Thin Film Optical Inspection Technology
碩士 === 明志科技大學 === 機電工程研究所 === 98 === The development of optical inspection technique has been booming over recent years, and both the optical elements and thin films can be tested in their surface roughness and recrystallization characterization with optical inspection technology. This paper is aime...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32767433657804808985 |