| Summary: | 碩士 === 明志科技大學 === 化學工程研究所 === 98 === In this thesis, oxalic acid, citric acid, tartaric acid,and other organic acids solution on the indium tin oxide (Indium tin oxide, hereinafter referred to as ITO) thin film electrochemical etching effect, we also expect the study to increase the surface reaction of ITO understanding, in order to achieve the goal of optimal surface treatment. Therefore, this paper investigates the series of weak acid solution on the amorphous ITO electrochemical effects of weak acid which easily corrode. The application of electrochemical detection techniques include linear scan voltammetry and open circuit voltage test; after polishing and corrosion using electrochemical methods of surface treatment of ITO thin films, using atomic force microscopy to analyze the surface of ITO film, electron microscope, EDS elemental analysis of the surface of ITO indium, tin distribution, and the four-point probe method resistance measurement ITO film to understand the electrochemical surface roughness changes. It was found that, ITO/PET used of positive potential conditions, the roughness of tartaric acid was higher than the citric acid and oxalic acid, sheet resistance value is lower than the citric acid and oxalic acid, in the two-stage potential of oxalic acid under the conditions of the roughness and sheet resistance the highest value, so the surface of ITO is the most severe corrosion conditions. When the ITO/glass used of positive potential conditions, roughness of tartaric acid is higher than the citric acid and oxalic acid, and the sheet resistance value is the highest in oxalic acid.
ITO / glass in the second stage potential of oxalic acid (-0.25 V 、300 s, and then 3 V time 30 s) to get the difference between roughness 17.97 nm, sheet resistance of 4.84 Ω/□ obtained the best conditions in this experiments, can effectively improve the surface roughness and sheet resistance value for the least impact.
Key words：ITO/glass；Electrochemistry corrosion；Surface roughness
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