Simulation Based Investigation to Reduce Production Cycle Time for Wafer Fabrication

碩士 === 明志科技大學 === 工業工程與管理研究所 === 98 === In recent years, with the huge capital investments and high level of market competitiveness, semiconductor manufacturing industries must innovate of new process technology to increase market share and profit. Cycle time reduction is proved to increase producti...

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Bibliographic Details
Main Authors: Tsung-Shiun Hsieh, 葉宗訓
Other Authors: Ping-Yu Chang
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/39624260277740876346

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