| Summary: | 碩士 === 明新科技大學 === 電子工程研究所 === 98 === The micro-stepping driver was manipulated by LabVIEW in a different division angle for the study. And that can observe the different diffraction patterns with the various angles for the micro-grating loaded on the stepping motor. Further the relationship between the diffraction patterns and resolving power with various angles is investigated.
Laboratory Virtual Instrument Engineering Workbench, LabVIEW is graphical and programming software with an excellent integrated ability of mechatronics, the easily writing and correcting as well as high of compatibility. And NI Data Acquisition card is adopted to control the micro-stepping driver, thereby control the rotation of the step motor to achieve the precise control of micro-level corner angle. The micro-stepping motor driver can be slightly offset excitation for the split-step-level on the angle, so that the original steps of the angle of 0.9° stepping motors can be divided to the smallest angle 0.05625°. The micro-grating loaded on the shaft of stepping motor can be utilized to produce a different diffraction for improving the image resolving power. In the future, the fully automated measurement system of micro-grating performance can be applied on the controllable diffraction of micro-grating to improve the image quality. There will be the benefit for the development of integrated optoelectronic devices.
The micro-device will be fabricated by the common process of CIC CMOS-MEMS in this study. The common process can be directly integrated with the circuit. It is the most commercial method for manufacturing MEMS on the current stage.
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