Development of Mirau interferometer microscope
碩士 === 明道大學 === 光電暨能源工程學系碩士班 === 98 === This thesis is based on developing the Mirau objective with the specifications of 10X magnification, NA 0.28, working distance 33.5 mm and distortions 0.01 %. By using the white light interferometer applying to nanometer-scale metrology, the purpose of this wo...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50190314288540736052 |
| Summary: | 碩士 === 明道大學 === 光電暨能源工程學系碩士班 === 98 === This thesis is based on developing the Mirau objective with the specifications of 10X magnification, NA 0.28, working distance 33.5 mm and distortions 0.01 %. By using the white light interferometer applying to nanometer-scale metrology, the purpose of this work is to design Mirau objective lenses. The Mirau objective combines the function of image magnification of microscope with interferometer technology. The developed objective applied to white light interferometer for nanometer-scale metrology can provide the lateral resolution of 2 µm and the vertical resolution of 1 nm.
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