Process and Properties of Ti-B-N Hard Coating Synthesized by Unbalanced Magnetron Sputtering
碩士 === 明道大學 === 材料科學與工程學系碩士班 === 98 === Synthesis and characterizations of Ti-B-N coating by unbalanced magnetron sputtering system(UBM). The TiBN films were prepared using Ti33B66 target, and change into the varied N2 gas flow with the 0,7,14,21 sccm and the substrate bias voltage at 80,100,120 vol...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/thhukw |