SPC Monitoring Under Run-to-Run ControlFramework
碩士 === 銘傳大學 === 應用統計資訊學系碩士班 === 98 === For the last two decades, the run-to-run controller has become very popular to enhance the performance of semiconductor manufacturing processes by integrating feedback control and statistical process control. Due to lot-to-lot feedback adjustment, the recipe of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37467795535154854789 |