A Study on the Manufacturing and Characterization of Polysilicon Crystalline Materials
碩士 === 國立高雄應用科技大學 === 模具工程系 === 98 === This study is to manufacture the polycrystalline silicon ingot. Na2SiF6 is reduced to SiF4 at 650℃ using SRI(Stanford Research Institute)method. SiF6 is reacted with sodium in the reactor to produce the mixed products of polysilicon and sodium fluoride. The mix...
Main Authors: | Wen-Ming Chang, 張文銘 |
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Other Authors: | Shi-yung Chiou |
Format: | Others |
Language: | zh-TW |
Published: |
2010
|
Online Access: | http://ndltd.ncl.edu.tw/handle/44326858017499612835 |
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