A Study on the Manufacturing and Characterization of Polysilicon Crystalline Materials

碩士 === 國立高雄應用科技大學 === 模具工程系 === 98 === This study is to manufacture the polycrystalline silicon ingot. Na2SiF6 is reduced to SiF4 at 650℃ using SRI(Stanford Research Institute)method. SiF6 is reacted with sodium in the reactor to produce the mixed products of polysilicon and sodium fluoride. The mix...

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Bibliographic Details
Main Authors: Wen-Ming Chang, 張文銘
Other Authors: Shi-yung Chiou
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/44326858017499612835

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