Characteristics of VOC Emission from Photoelectric Semiconductor and Relative Electrical Industries

• Main Authors: Yu-Chen Yang, 楊宇蓁
• Other Authors: 許逸群
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/51391182445301417964

碩士 === 崑山科技大學 === 環境工程研究所 === 98 === The purposes of this study was to search the characteristics of VOC emission from photoelectric semiconductor and relative electrical industries (including general and toxic components of VOCs, emission coefficient and mass), and to compare the difference among the mass balance method, the investigation method and the emission coefficient for estimating the VOCs emission mass, or so to discuss the serviceability of three methods. There were at least 25 kinds characteristic components of VOC emission from 6 photoelectric manufacture plants, and 88.4% of the all emission mass including IPA (27.6 %), BDG (24.9 %), MEA (21.6 %), ethyldiol (9.6 %) and DMSO (4.7 %) were the five major components, the other 20 components were the minor components which contained four hazardous air pollutants as Toluene, xylene, dichloromethane and butylacetate. Total VOCs emission coefficient in the 6 photoelectric manufacture plants were 1.03 kg VOC/kg products for color filter + TFT-LCD display, 0.30 ~ 0.73 kg VOC/kg products for color filter, 0.16 kg VOC/kg products for cool cathode lamp, 0.0924 kg VOC/kg products for organic fluorescent dipole display and 0.00143 kg VOC/kg products for photoconductor plate. There were at least 21 kinds characteristic components of VOC emission from 2 semiconductor manufacture plants, and 89.4% of the all emission mass including acetone (44.4 %), PGMEA (23.7 %), NMP (11.9%), IPA (5.0%) and TMAH (4.4 %) were the five major components, the other 16 components were the minor components which contained three hazardous air pollutants as xylene, dichloroethylene and butylacetate. Total VOCs emission coefficient in the 2 photoelectric manufacture plants were 0.0408 kg VOC/kg products for wafer plate, 0.544 kg VOC/kg products for wafer. There were 3 kinds of characteristic components of VOC emission from 3 electric wire (Enamel-insulated wire) manufacture plants, which included cresols (30.1 %), phenol (30.0 %) and xylene (39.9 %) that were all belong to HAPs. Total VOCs emission coefficient in the 3 electric wire (Enamel-insulated wire) manufacture plants were 0.041 ~ 0.062 kg VOC/kg products for electric line. Comparisons of the difference between the estimation of VOC emission mass using mass balance method and investigation method exhibited that the investigation method obtained 34.5 % of VOC emission mass less than that using mass balance method in the case of semiconductor plant B, while 65.3 % less in the case of photoelectric plant G. The emission coefficient method was also used to estimate the VOC emission mass from photoelectric plant G with the public emission coefficient 0.18 (kg/m2 LCD) from Taiwan EPA, which obtained the emission mass of 11.9 ton/year that had the difference percentage of 40.0 % and 79.2 % larger than that using mass balance method and investigation method.