Thermal-Hygro-Vapor Pressure-Mechanical Analysis and Reliability on MEMS-Based Pressure Sensor
碩士 === 義守大學 === 機械與自動化工程學系碩士班 === 98 === Over the past decade, the micro-electro-mechanical systems (MEMS) sensor industry has made continuous improvements for size-reduction, reliability and low cost. In this research, thermo-hygro-vapor pressure-mechanical analysis and reliability design on pre-mo...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39877383247868045200 |