Design of Laterally Driven Microstructure Filters

• Main Authors: Bo-hsien Lin, 林柏賢
• Other Authors: Chieh-Chuan Feng
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/29675334592532245430

碩士 === 義守大學 === 電機工程學系碩士班 === 98 === There are many applications of using silicon-based vibrating microstructure as a filters in microwave communication circuits. The focus has been on the microstructure that moves vertically or laterally only. In this paper, we study laterally driven mircrostructure filter that the input signal drives the structure from the side, while the output signal will be detected by the motion moved vertically. The results show that with three clamped-clamped and three cantilever beams design, we effectively achieve around 11.27dB stopband rejection and shape factor is around 10.6 .