Design of Laterally Driven Microstructure Filters
碩士 === 義守大學 === 電機工程學系碩士班 === 98 === There are many applications of using silicon-based vibrating microstructure as a filters in microwave communication circuits. The focus has been on the microstructure that moves vertically or laterally only. In this paper, we study laterally driven mircrostructur...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/29675334592532245430 |