Design and Prototyping of a Micro-fluidics Integrated System

• Main Authors: Chih-Hsiung Chen, 陳志雄
• Other Authors: Fu-Shin Lee
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/41271264515593391281

博士 === 華梵大學 === 機電工程學系博碩專班 === 98 === The object of this proposal is to design and prototype a novel electromechanically-actuated linear micro-pump biochip integrated system based upon semiconductor fabrication processes. The electromechanical actuators acquire the superior actuation characteristics such as high electric-mechanical converting factor, lightweight with smaller volume, fast dynamic response, and high-resolution displacement. The aforementioned overall electromechanically-actuated micro-pump biochip integrated system consists of a linear micro-channel with a bottom substrate arrayed with magnetically conductive materials and a upper polyamide layer coated with electroplated coils, a VHDL embedded real-time control sub-system with a developed hardware as well as its firmware, a high resolution micro-fluidic transportation sub-system, and a power amplification sub-system for driving the arrayed electromechanical actuators. The pump actions can be accomplished based upon the controlled actuations of the arrayed electromechanical actuators, which are composed of the aforementioned structures being energized systematically by externally applied voltages on the arrayed electroplated coils. Consequently, each individual actuator would gain electromechanical forces periodically between the upper coil and bottom magnetically conductive materials internally, and cause the polyamide membrane to deform up and down as to pump the micro-fluidic within. As a result, the micro-fluidics would be pumped and transported within the linear micro-channel once the arrayed electromechanical actuators are energized in a designed and controlled manner. Also, the valve-like behaviors at the inlet and outlet of the linear channel can be accomplished once the arrayed actuators are controlled to perform a dedicatedly designed deformations as to obtain the require pressure differences at these locations. The experimental results for the assembled micro-pump structure show that the prototyped system can acquire a transportation efficiency of 60.40μl/min~65.32μl/min. The accomplishment of the proposed research would eventually draw a solid line on developing the novel designed electromechanically-actuated linear micro-pump integrated system domestically, and to establish the power for designing and implementing a VHDL embedded FPGA structure on certain biochip systems.