Microstructural and Optical Properties of UV/DUV Fluoride Thin Films Fabricated by Thermal Evaporation with Ion Assisted Deposition Using SF6 as Working Gas
博士 === 輔仁大學 === 應用科學與工程研究所博士班 === 98 === Fluorides are present used to accomplish optical coatings for UV and deep UV range applications. Many techniques such as thermal evaporation, ion beam sputtering, electron-beam evaporation, magnetron sputtering, and ion-assisted deposition (IAD) are applied t...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60730128979008328021 |