MEMS fabricated VOC preconcentrator chips
碩士 === 輔仁大學 === 化學系 === 98 === The objective of this study is to design, fabricate and characterize a micro preconcentrator that directly synthesize carbon based adsorbent film inside an pre-sealed, anodic bonded micro channel. Parameters for the synthesis of carbon film adsorbent such as starting h...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60950631184876308487 |