The Study of Laser Crystalliztion Method on Tri-gated Poly-Si Nanowire Thin Film Transistors
碩士 === 逢甲大學 === 電子工程所 === 98 === Poly-Si thin-film transistors (TFTs) have been widely used as switching elements in active matrix display. For applications on system-on-pannel (SOP) and three-dimension integrated circuits (3-D ICs)，further improvements of device performance are required. The mobili...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/93947674394194323812 |