The effects of in-situ nitridation and post-thermal oxidation on the microstructure and hydrophilicity for sputter-deposited titanium oxide（TiO and TiO2）thin films－The effects of in-situ nitridation and post-thermal oxidation on the microstructure and hyd
碩士 === 逢甲大學 === 材料與製造工程所 === 98 === Pulsed magnetron sputtering of a titanium target at various reactive partial-pressure atmospheres (Ar/O2/N2) was used to fabricate thin films of titanium mono-oxide (TiO), titanium dioxide (TiO2), and nitrided countparts (TiO1-xNx and TiO2−xNx) onto glass substrat...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/00286741827983892740 |