Characteristics of Gallium and Aluminum Co-doped ZnO Transparent Thin Films Deposited on PET Substrates by RF Magnetron Sputtering
碩士 === 逢甲大學 === 材料與製造工程所 === 98 === The author reported that surface treatment for PET substrates by using corona discharge and Ga and Al co-doped ZnO (GAZO) thin films deposited on as-treatment PET substrates by RF magnetron sputtering. Characterization of PET substrates after corona discharge was...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2010
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Online Access: | http://ndltd.ncl.edu.tw/handle/83473761528208966090 |