Removal Performance Investigation Of Volatile Organic Compounds From TFT-LCD Industry By Using Rotary Regenerative Thermal Oxidizer

• Main Authors: Yi-Hsin Chien, 錢一心
• Other Authors: none
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/80699024222021982261

碩士 === 朝陽科技大學 === 環境工程與管理系碩士班 === 98 === This paper aims at investigating the removal efficiency of volatile organic compounds (VOCs) produced from Thin Film Transistor Liquid Crystal Display (TFT-LCD) by using Rotary Regenerative Thermal Oxidizer (RRTO). Temperature in the furnace of RRTO was maintained at 850℃. Rotary speed of RRTO was operated in 2.5 revolution/hr. Inlet gas was 1,3753 m3/min and adsorption gas was 91 m3/min. Rotary concentrated ratio was 1/15. Adsorption temperature was set at 205℃. VOCs such as PGMEA, PGME, nBA and IPA were analyzed with FTIR and GC-FID. PGMEA, PGME, nBA and IPA were reduced from 3.3, 118, 75.4 and 431 mg/Nm3 to ND, 1.85, 1.15 and 4.16 mg/Nm3 respectively. Removal efficiency of PGMEA, PGME, nBA and IPA were found to be 100, 98.43, 98.47 and 99.03% respectively. Results implied that RRTO could improve the removal of VOCs efficiently.