| Summary: | 碩士 === 中原大學 === 機械工程研究所 === 98 === The accuracy of a micro machining is very sensitive to the cutting parameters, stability of the micro cutter. Imperfect selection of cutting parameters easily results in abnormal vibrations causing worse surface roughness and non-uniform tool mark depths. A tilted or deflected cutter will cause non-uniform width of tool mark and deviation of cutting path. Thus, an effective measurement method to identify the abnormalities and errors is very important for improving the accuracy of a micro machining process. However, because of the limit of working space, it is very difficult to on-line measure the machining errors from a machined miniature component, and use the results for error compensation to further improve the machining accuracy. Several machine-vision-based measurement methods that can on-machine inspect the abnormal cutting vibration and the non-iso-height contour error were developed in this study. The influence of major errors on measurement accuracy was explored through error sensitively analysis. On grey level comparison method, AREN method, image projection method, and Canny Edge method were used to develop the measurement method. Micro machining experiments were conducted to verify the effectiveness and accuracy improvement efficiency of the developed measurement methods. The experimental results have shown that the measurement method can effectively improve the machining accuracy of a micro machining process.
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