| Summary: | 碩士 === 中原大學 === 機械工程研究所 === 98 === Abstract
Biochip plays an important role in biotechnology and many scientists also pay a lot of attention on this product. Biological detection technology is different from the past. Biochip has the advantages such as to shorten detect time, to reduce manual errors, to reduce the consumption of sample, and it contains high stability. Micro-electro-mechanical systems (MEMS) integrate microelectronics and mechanical engineering. MEMS is a cross-field integrated science that it minimizes mechanical components and integrates with electron, optics, fluid component to become a miniature system to reach various complicated function.
In this study we use silicon wafer as substrate, use MEMS and sacrificial layer techniques to manufacture the microfilter. It only depends on different development properties of the positive and negative photoresists. SU-8 negative photoresist as microchannel and the structure of micropump, AZ4620 positive photoresist as sacrificial layer. The feature size of filtration can be precisely controlled by the thickness of sacrificial layer. The main materials for this study are just photoresists, such as negative photoresist SU-8 and positive photoresists AZ4620, and use the piezoceramic buzzer as actuator to produce the micropump chip. All processes are performed in non-clean room. We use only two mask, spin coater and simple exposure machine to make 3cm × 3cm microfilter with active micropump chip.
The fabrication process is carried out in the yellow room. Compare with the traditional micromachining methods such as bulk micromanufacturing, surface micromachining and the LIGA process, this proposed design and fabrication of microfilter have many advantages including economical fabrication cost and high yield.
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