| Summary: | 碩士 === 中原大學 === 電子工程研究所 === 98 === In this study, the silicon-based micro-channel is studied in comparison with the traditional capillary for gas chromatography (GC) applications which require low cost, low power consumption, compact size and rapid detection. Based on the recent developed processing technologies in micro-electro-mechanical systems (MEMS), the micro-channels are successfully designed and fabricatedas capillary column. Four different volatile liquids include ethanol, methyl ethyl, ketone, benzene, toluene are used in this work to evaluate the micro-channels. The micro-channels having channel width of 200μm, depth of 100μm and length of 1m, are also compared with the capillary column for the quantitative analysis.
In gas chromatography, the experimental results have demonstrated the micro-channels’ capability in quantitative analysis. This result will assure the potential development for a portable and fast detection gas chromatography system.
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